Description
Lam Research 853-495649-009 Product Overview
Brand: Lam Research
Model: 853-495649-009
Product Name: ESC Power Supply (Electrostatic Chuck Power Supply)
Technical Parameters
Dimensions: 482 mm (W) × 133 mm (H) × 550 mm (D) (approx. 19” rack‑mountable)
Weight: Approx. 12 kg
Country of Origin: United States
HS Code: 8504.40.90 (industrial high‑voltage DC power supply)
Operating Temperature: +10 °C to +40 °C (cleanroom environment)
Storage Temperature: -20 °C to +60 °C
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853-495649-009
Relative Humidity: 20 % to 80 %, non‑condensing
Input Voltage: 100–240 VAC, 50/60 Hz, single‑phase
Power Consumption: Max. 800 W
Output Voltage: 0 to +5 kV DC (adjustable), 0 to -5 kV DC (adjustable)
Output Current: Max. 200 mA (per channel)
Ripple & Noise: < 0.1 % of full scale
Protection Features: Over‑voltage, over‑current, short‑circuit, over‑temperature, arc detection
Communication: RS‑232, Ethernet (TCP/IP) for remote control and monitoring
Protection Class: IP20 (industrial metal enclosure)
Mounting: 19” standard rack‑mount (3U height)
Certifications: CE, UL, SEMI S2, RoHS compliant
Characteristics: High stability and accuracy; fast arc quenching; digital control with LCD display; LED status indicators for power, output, fault; conformal coating for harsh environments; hot‑swap capable in compatible systems
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Shipping:
1. Your item will be shipped to all countries via EMS, unless one country cannot be shipped via EMS. We will choose DHL, UPS, or FedEx. Please leave us your phone number.
2. We will ship the product to you on the same day or within 1-2 working days after receiving your payment. The shipping time depends on the country/region where you reside, the customs and habits of your country/region, and especially during peak hours.
3. Assuming (assuming) that the item requires payment of tariffs from your country, the buyer is obligated. We are not responsible for any taxes or customs fees in your country/region.
Return Policy:
1. Please contact us before returning the item.
2. The buyer should inform the seller of all returned items within 7 days after receiving the package. We reserve the right to reject any request to inform the seller for more than 7 days.
3. Returned products must have all original packaging and be in good condition.
Response policy:
If you are satisfied with the purchase, please leave us an active response.
2. If you have any questions about the outcome of the transaction or product, please contact us first and we will do our best to satisfy you!
3. Please do not reply with negative feedback before contacting us!
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