810-034806-105 LAM Interface Research PCB Assembly NEW

The LAM Research 810-034806-105 is a dedicated printed-circuit-board interface assembly designed for semiconductor etch processing equipment. It serves as the signal interconnection bridge between the HALO radio-frequency subsystem and VCI control unit inside LAM wafer processing chambers.

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Description

810-034806-105 LAM Research Product Description
Brand: LAM Research
Model: 810-034806-105
Product Name: HALO/VCI INTRF-6 Interface PCB Assembly
Dimensions: 210 mm × 145 mm × 25 mm
Weight: 0.20 kg
Country of Origin: United States
Customs HS Code: 8542390090

810-034806-105

810-034806-105

Temperature Specifications
Operating ambient temperature: 10 °C to +40 °C, compliant with semiconductor clean-room operating environment
Storage temperature: -20 °C to +60 °C
Relative humidity: 20 %-80 % non-condensing
Input Specifications
Power supply input draws regulated DC power from the equipment internal backplane, typical 5 VDC and 24 VDC supply rails. Multi-channel digital logic input receives control signals, trigger commands and status feedback signals from VCI main control hardware. Differential signal inputs accept sensing feedback data coming from HALO RF module circuits.
Output Specifications
Multi-channel digital output transmits decoded control signals toward HALO RF functional unit. Status signal outputs feed hardware diagnostic and fault feedback signals back to the host equipment controller. On-board test point outputs support bench inspection and maintenance measurement. No direct field-wired high-power or analog process output terminals for external process actuators. Internal connector interfaces complete high-speed signal exchange between sub-systems inside the tool chassis.
Key Features
Compact chassis-mount PCB assembly optimized for LAM semiconductor etcher internal layout. Multi-layer circuit layout ensures signal integrity for high-speed digital and differential control signals. Built-in ESD protection circuits defend against electrostatic risks in clean-room working conditions. Integrated signal filtering suppresses electromagnetic interference generated by nearby RF power hardware. Standard board-to-board connector design enables quick plug-in replacement during equipment repair. On-board test points support convenient troubleshooting without complex disassembly. Strict component screening meets high-reliability requirements for continuous 24-hour fab production operation. Revision-controlled OEM spare part matching original tool hardware architecture.

810-034806-105

810-034806-105

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