Description

Application Cases of 260-00102-01 ZYGO

1.Semiconductor Wafer Inspection:
In a leading semiconductor manufacturing plant, the 260-00102-01 ZYGO is applied to the precision measurement of 12-inch silicon wafers. Leveraging white light interferometry technology, it achieves comprehensive high-precision detection with the following key parameters: surface flatness measurement accuracy of ≤5nm, thickness uniformity tolerance of ≤±0.1μm, total thickness variation (TTV) tolerance of ≤0.1μm, local thickness variation (LTV) accuracy of ≤0.05μm/10mm, and the capability to detect micro-defects as small as 0.1μm (including scratches, particles and pits) during the etching and polishing processes. Additionally, it features surface roughness (RMS) measurement repeatability of ≤0.005nm and a measurement speed of ≤90 seconds per 12-inch wafer, with a measurable wafer thickness range of 50-2000μm. These precise measurements ensure the yield of subsequent chip packaging (especially for 28nm and advanced process nodes) and improve the reliability of semiconductor devices.

2.Aerospace Component Metrology:
For the key components of a commercial aircraft engine, such as turbine blades and combustion chamber parts, the 260-000102-01 ZYGO realizes ultra-precision dimension verification with a measurement uncertainty of ≤0.05μm. It effectively controls the geometric tolerance of components (e.g., straightness ≤2μm/m, flatness ≤3μm) under high-temperature and high-pressure working conditions, helping to enhance the safety and service life of the engine.

3.Optical Element Calibration:
In an optical lens production enterprise, this equipment is used for the surface profile measurement of high-end camera lenses and laser optical components. It features a curvature radius measurement accuracy of ≤0.001% and a surface roughness (RMS) measurement capability of ≤0.005nm, precisely capturing key parameters to ensure the imaging quality and light transmission efficiency of the final products, which are widely used in medical imaging and industrial detection equipment.

4.Automotive Precision Component Testing:
In the R&D and production of new energy vehicle power batteries, the 260-000102-01 ZYGO is adopted to measure the flatness of battery cell pole pieces (accuracy ≤10μm/100mm) and the parallelism of battery modules (tolerance ≤5μm). It provides accurate data support for optimizing the battery assembly process, reducing internal resistance of the battery pack and improving the energy density and cycle life of the battery.

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